• MegaCold 12A/20A/32A/50A Water Vapour Cryopump
  • cryopump product video 2021
  • Comparison of Cryopumping Speed and Pressure - 50 Hz
  • Comparison of Average Temperature (A) and Cryosurface Temperature vs. Heat Load (B) - 50 Hz

MegaCold 12A/20A/32A/50A Water Vapour Cryopumps

Our own-brand MegaCold water vapour cryopumps are the most cost effective addition to an existing vacuum system or as part of a vacuum pumping solution for new systems. It can dramatically reduce pump down times and significantly improve product quality and throughput. In production this means more cycles per day.

 

Typically 50-100% throughput improvements are achievable. MegaCold products work on the principle of Meissner trapping, whereby water vapour is captured by condensing onto a cryogenically cooled surface (a cryocoil) that is placed inside the vacuum chamber so pumping is not limited by pumping ports.

The MegaCold range is controlled by an industry standard PLC with a touchscreen local interface for ease of use and graphing of current or historic data. It has a full set of remote options. The equipment is available in a range of configurations including single & dual output cooling circuits giving independent control over a cryocoil and baffle.

 

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Benefits

  • 50-100% increase in water vapour pumping speeds allow you to increase the production cycles per day of downstream;
  • Gasless design dramatically reduces the running cost as the self-contained unit required no consumables to operate;
  • Remote configuration and monitoring allow you to setup and maintain the cryopump from a central location, reducing on-site time.

 

What is a cyropump?

A cryopump is a type of vacuum pump that traps gases or vapours by condensing them on a super cooled surface - a cold bathroom mirror uses a similar principal to condense the vapour from a hot tap. They are typically used in applications where specific gases or vapours need to be removed from a supply, and the supply made ‘clean’ before it can be used, such as within the semiconductor, electronics, optical coatings and medical device industries.

Typically, the overall performance of cryopumps is evaluated by the pumping speed (the rate at which vapours can be removed). Generally speaking, the larger the cooled surface (cryocoil) surface area, the greater the pumping speed. High performance cryopumps therefore tend to be larger in overall size.

Cryopumps are not entirely continuous as, at regular cycles, it will ‘regenerate’, whereby the trapped gases or vapours are warmed and converted back to their original state, where they can then be extinguished.

Due to the lack of moving parts within a cryopump, they are vibration-free, relatively insensitive to contaminants and chemical reactions, whilst typically extremely hard wearing and reliable over years of continued service.

How a cryopump works

  1. An internal surface (cryocoil) is super cooled to below -150°C;
  2. The unfiltered source gas is pumped into the chamber, where unwanted vapours are condensed at a rate of up to 370,000 litres/second;
  3. The filtered gas is pumped out of the chamber ready for us;
  4. Periodically, the chamber is warmed, and the condensed vapours return to their original form, where they are then safely extinguished.

 

Selection and application

Selecting and sizing the appropriate model for the application is dependent on many variables. Based on our years of experience we have established some baseline principles to simplify this task. Typically, when adding water vapour pumping on an open load system, pump down times are reduced in the range 50-75%. To accomplish this we take existing Water Vapour Pumping speed of the pumping system (in chamber) and multiply by a minimum factor of 4. Taking this value we are able to determine the cryocoil surface area. Knowing the ultimate vacuum level of the process chamber we can look up the coil temperature required from the featured table. Now knowing the temperature required we can determine the cooling capacity required and select the appropriate model. Allowances may need to be made for any additional heat sources within the chamber or if the Cryopump is placed a significant distance from the vacuum chamber.​

Custom upgrades

In addition to the standard features found on the MegaCol units, the following component can be manufactured to your specification as required:

Megacold - Key system components (cryocoil)

Cryocoil

The cryocoil will be designed to fit the specific vacuum chamber, based on information you supply, or you may choose to design and build your own cryocoil. Typical cryocoils have helical, spiral, serpentine or other simple shapes.

MegaCold - Key systems components (feedthrough)

Feedthrough

The standard cryogenic feedthrough provides thermal isolation between the feed/return tubes and the O-ring seal. The dual pass feedthrough requires a two-inch diameter hole in the vacuum chamber.​

MegaCold - Key system components (refrigerant line)

Refrigerant line

A standard refrigerant line set consists of a copper feed and return line, each with stainless steel couplings on both ends for connection to the MegaCold unit and to the feedthrough. Optional vacuum insulated lines are available if required.​

MegaCold - 20A/32A/50A specifications

Specifications

 

 

MegaCold™ 12A

 

MegaCold™ 20A

 

MegaCold™ 32A

 

MegaCold™ 50A

 

Power requirements

380v - 460v, 50/60Hz

Maximum power (KW)

 

9.7

 

11.7

 

14.1

 

18.1

 

Electric current (A)

 

17.7

 

21

 

24

 

31

 

Theoretical max pumping speed (l/s)

 

89,400

 

149,000

 

238,400

 

372,500

 

Conservative Pump Speed (l/s)

 

60,000

 

100,000

 

160,000

 

250,000

 

Maximum Cooling Capacity (w)

 

1,500

 

2,100

 

3,200

 

4,000

 

Cryocoil Tube Length (M)

 

12

 

20

 

32

 

50

 

Cryocoil Surface m2

 

0.6

 

1

 

1.6

 

2.5

 

Pre-Cooling Time (Min)

 

25

Cooling Time (Min)

 

<3

 

<3

 

<4

 

<5

 

Defrost Time (Min)

 

<3

 

<3

 

<3;

 

<3

 

Return Cooled (Min)

 

--

 

--

 

<5

 

<5

 

Cooling water max flow (l/min)

 

25

 

30

 

42

 

55

 

Refrigerant

 

Environmental mixed refrigerant

 

HFC blend

Control Systems

 

PLC + touch-screen interface

Dimensions A x B x C (mm)

 

750 x 850 x 1550

 

750 x 950 x 1650

 

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