BeamTec Multi Hearth Evaporators

BeamTec Multi Hearth Evaporators

The new SmartBeam evaporator series is suitable for optical coating processes as well as for metallisation at high coating rates. An efficient cooling system of the crucible and the deflection unit guarantees reliable operation in demanding production processes.

All multi hearth evaporators produce a small beam diameter of 3 mm with minimal distortion over the crucible surface. The crucible drive is carried out by means of a DC motor with built-in encoder and absolute position marking.

In the EB M series, the motor and crucible drive are on the atmosphere side and are flanged axially to the crucible shaft.

In the EB S series, the motor and crucible drive are encapsulated in the vacuum. This allows free positioning of the evaporator within the coating chamber.

 

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Features of the WARP range

  • Magnet system with low inductivity and effective cooling
  • Small beam diameter independant from its position on the crucible
  • DC motor on atmosphere side with integrated encoder und absolute positioning
  • High performance and LiftOff filament block
  • Support of high Sweep frequencies
  • Excellent control of the beam for opt. Materials
  • Reliable crucible positioning with stall protection
  • Easy filament installation and long filament lifetime

 

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