Brooks GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.

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  • Programmable multi-gas/multi-range capabilities
  • Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
  • Sub-1 second flow response time and accuracy of 1% set point for demanding applications
  • Well suited for a variety of gases
  • Fast response, Hastelloy sensor
  • Easily accessible diagnostic service port is independent of tool communication
  • Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface



  • MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
  • MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
  • OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
  • Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
  • Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
  • User-accessible service port simplifies troubleshooting and diagnostic tasks
  • Variety of elastomer seals provide cost performance flexibility across range of applications
  • Multi-protocol communication interface supports integration into existing systems



  • Solar cell chemical vapor deposition systems
  • Life sciences bioreactors
  • Vacuum processes
  • Nanotechnology/MEMS fabrication
  • Plasma, glass and web coating systems
  • Excellent option for manifold/gas delivery systems


Why buy from Megatech?

  • Megatech is a fully authorised distributor of Brooks Instruments products;
  • We have over 20 years of experience in installing and supporting the Brooks Instruments products;
  • UK-based support via phone and email;
  • Any faulty items are returned to our UK-base for immediate swapout.


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