Brooks Instrument’s vacuum and pressure controller technology is used by semiconductor OEMs, gas cabinet suppliers and vacuum controller system manufacturers including thin-film deposition systems and high-tech specialty furnaces. The portfolio includes regulators and sensors that precisely measure and control pressures ranging from vacuum to 3000 psi;
Pressure and Vacuum
Brooks CMC Series Capacitance Manometers
CMC Series capacitance manometers from Brooks Instrument deliver reliable, accurate vacuum measurement over a wide range of operating temperatures.
Brooks SolidSense II® Pressure Transducers
For measuring pressure in ultra-high purity and specialty gas applications across many industries, pressure transmitters and transducers must maintain stability and accuracy.
Brooks 122 Series Mechanical Pressure Gauges
The Brooks Instrument 122 Series mechanical pressure gauges were designed and developed for the demanding high-purity applications of the semiconductor industry.
Brooks XacTorr Vacuum Capacitance Manometers
acTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.