EVT-x00 Wafer Sorter

The EVT machine is a Windows® based, simple to operate, programmable automatic wafer transfer system. Fully customizable software to meet all of your wafer transfer needs. Ergo friendly load station includes two cassette platforms with a tilt feature that makes loading easy and stress free. Mactronix machines are totally electronic, with an auto switching power supply, 110 VAC 60 Hz or 240 VAC 50/60 Hz. Tabletop design. The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure). Single Board PC controlled. Sensors detect wafers and cassette or process carrier presence for safety. Flat alignment is maintained during transfer.​

 

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Features

  • Simple to operate, Windows-based, programmable automatic wafer transfer system.
  • Fully customizable software to meet all of your wafer transfer needs.
  • Ergo friendly load station includes two cassette platforms with a tilt feature that makes loading easy and stress free.
  • Mactronix machines are totally electronic, with an auto switching power supply, 110 VAC 60 Hz or 240 VAC 50/60 Hz.
  • Table top design.
  • The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
  • Single Board PC controlled.
  • Sensors detect wafers and cassette or process carrier presence for safety.
  • Flat alignment is maintained during transfer.
  • Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
  • All exposed aluminum parts are hard Black Anodized.

Specification

Power110/220V, 50/60Hz
GroundingSingle point low impedance VAC
Wafer size3" (75mm) - 8" (200mm)
Weight80 Lbs
Dimensions610mm (24") x 650mm (25.5") x 953mm (37.5")

 

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