- Horizon Junior 2-Stage Series V will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette.
- PLC controlled enhancing system simplicity.
- As with all Mactronix wafer transfer systems, the Horizon Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.
- With the push of a button, the machine transfers wafers automatically.
- Stage shifts for easy loading and unloading of carriers and boats.
- The Horizon Series V machines are designed to limit particle contamination by using rod-less cylinders, “clean room grade” rails and bearings and electric boat sensors.
- The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
- All aluminum parts are hard black anodized for corrosion resistance.
- Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches.
- Lift system uses ramped speed controls for gentle pick-up and landing.
- Pressure sensors are used for both personal safety and prevent wafer damage by inhibiting machine operation.
- Retainers default to closed position to prevent the dropping of wafers in the event of a power disruption or a loss of air pressure or both.
- A “Maintenance/Cleaning Mode” is provided to facilitate preventative maintenance.
- The Series V machines have been tested with up to 50,000 volts of electrostatic discharge without disruption to internal electronics. The Series V machines are virtually immune to RFI noise, EMF, and ESD.
HJ2-x25 P5 Wafer Transfer Machine
Horizon Junior 2-Stage Series V will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette. PLC controlled enhancing system simplicity. As with all Mactronix wafer transfer systems, the Horizon Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers. With the push of a button, the machine transfers wafers automatically. Stage shifts for easy loading and unloading of carriers and boats. The Horizon Series V machines are designed to limit particle contamination by using rod-less cylinders, “clean room grade” rails and bearings and electric boat sensors. The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure). All aluminium parts are hard black anodized for corrosion resistance.
Options
- Recessed mounting
- Vespel package for high temperature applications
- Stainless steel covers
- Hot boat sensor
Specificationfications
| Power | 220/110VAC 50/60Hz Single Phase 3 Amp @ 110VAC | ||
|---|---|---|---|
| CDA/N2 | 75 to 90 psi | ||
| Grounding | Single Point Low Impedance VAC (provided) | ||
| Exhaust | 1.25″ Diameter port; 5 CFM max (non-process) | ||
| Wafer size | 3" (75mm) - 8" (200mm) | ||
| Weight | 70 Lbs | ||
| Dimensions | 75mm thru 150mm (3″thru 6″): 17″ x 14″ x 32″ 200 mm (8 inch): 17” x 24” x 47” | ||