- 900- 1700 nm range
- Provides robust endpoint determination
- Can be used with existing SpectraView™ software
- Use for endpoint detection, fault detection, process diagnostics, and as part of a spectral reflectometer
SD512GR High Performance Spectrometer
The SD512GR was designed for demanding semiconductor process applications. Its optical system employs a 512-element, linear Indium Gallium Arsenide Photodiode Array. The advantages of the SD512GR include excellent sensitivity over the 900 – 1700 nm range, user-selectable sensitivity, a thermoelectric cooler which reduces thermal noise, and an integrated blocking filter which eliminates second and higher orders.