Dual Frequency RF Power Supplies

Dual Frequency RF Power Supplies

Dual frequency RF generators combine two frequencies (LF or HF) intor a single unit that offers outpput power of up to a 3000 watts. The high frequency (HF) section provides up to 1500 watts of power, with optional frequencies from 2 to 60 MHz and the low frequency (LF) section can deliver 1500 watts, with optional fixed or variable frequencies ranging from 20 kHz to our 13.56 MHz. Units can be configured as two LF sections, two HF sections or one HF and one LF section.

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Applications
Applications include etch, ICP, RF sputtering, PECVD, and solar photovoltaic applications. Additional applications include induction and dielectric heating processes in industrial systems

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Typical features

  • Complies to CE-Mark standards and is ETL Marked and SEMI F47 compliant
  • Protection circuits safeguard the amplifiers from over-voltage, over-current and over-power operating conditions
  • Gain-control circuitry stabilizes output power against line and load variations, and limits power during high VSWR conditions
  • Unique power monitoring in the low-frequency section measures delivered power into any impedance load
  • Optional fast frequency tuning available in the low- frequency section eliminates the need for a matching network in many applications​

 

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