Mass Flow Metres and Controllers
Brooks GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters
Brooks GF40 (elastomer seal) and GF80 (metal seal) thermal mass flow controllers (MFCs) and thermal mass flow meters (MFMs) achieve unprecedented performance, reliability, and flexibility in many gas flow measurement and control applications.
Brooks XacTorr Vacuum Capacitance Manometers
acTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.
Entegris flow meters and controllers
Entegris Flow Controllers combine proven and reliable, differential pressure flow measurement technology and advanced closed-loop process control.
Brooks GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters
For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both.
Brooks 5850E Series Elastomer Sealed Thermal Mass Flow Controllers & Meters
Every product line has a workhorse — the 5850E and 5850i Series thermal mass flow controllers fit the bill.
Brooks GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters
Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides.
Brooks Quantim® Series Coriolis Mass Flow Controllers & Meters
Achieve superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid measurement and control with the Quantim® Coriolis mass flow controllers and meters from Brooks Instrument.