Low Frequency RF Power Supplies

Low Frequency RF Power Supplies

Low Frequency (LF) RF generators are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The Turbotune Technology within the unit allows frequency tuning by automatically varying its output frequency +/-10% around its nominal frequency and the solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership.

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Applications
Our Low Frequency RF Power Supplies are designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, ICP, RF sputtering, PECVD, and solar photovoltaic applications. Additional applications include induction and dielectric heating processes in industrial systems.

 

Typical features

  • Small, lightweight packaging
  • Standard power ranges: 1250, 3000 Watts
  • Any single frequency from 20 kHz to 2 MHz, varying +/-10%
  • Phase lock tuning or software algorithm
  • Designed to meet ETL and SEMI F47 directives
  • Forward or Delivered power mode regulation​

 

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