Entegris flow meters and controllers

Entegris flow meters and controllers

As an official distributor of Entegris products, Megatech can supply the full range of InVue integrated flow controllers and flow meters, which combine proven and reliable differential pressure flow measurement technology and advanced closed-loop process control.

Entegris Flow Meters

Electronic Flow Meters

Entegris flow meters provide simultaneous measurement of outlet pressure and flow rate, allowing for greater control of process variables. Some of the benefits include:

  • No moving parts to generate particles
  • Nonmetallic sensing technology for reliable measurement
  • Integral pressure transducer for additional process information
  • Flow-through design to minimizes dead volume
  • 1% full scale accuracy for critical measurements
  • Easy installation in any orientation


Entegris Integrated Flow Controllers

Integrated Flow Controllers

Entegris Flow Controllers offer precise point-of-use chemical flow control and are designed for point-of-use blending and dispense applications. Some of the benefits include:

  • Most accurate in bubble prone media vs. other commonly used technologies
  • Integral pressure transducer for simultaneous dual output – flow and pressure
  • Compact footprint for space savings and easy installation
  • High repeatability for superior process control
  • Fast response for accurate dispense rates
  • LED status and discrete alarm output


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