Brooks Quantim® Series Coriolis Mass Flow Controllers & Meters

Brooks Quantim® Series Coriolis Mass Flow Controllers & Meters

Achieve superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid measurement and control with the Quantim® Coriolis mass flow controllers and meters from Brooks Instrument. With the Quantim® series, Brooks has taken the lead in driving improvements in Coriolis flow technology: Their patented Quantim® Coriolis sensor design measures low flows independent of fluid type or process variables.​

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  • True mass flow measurement
  • Accurate density measurement
  • 100% of fluid flows through low-mass sensor tube (no bypass)
  • The Quantim® Coriolis series' proprietary optical sensing technique enables accuracy at extreme low flows
  • Measures both liquids and gases over a wide flow range
  • Coplanar valve delivers super-fast response times
  • The Quantim® Coriolis series' offers the smallest, lowest-flow Coriolis meter and controller available on the market
  • Measures and outputs two of four parameters: mass flow, volumetric flow, temperature, density
  • Independent diagnostic/service port and user display
  • Variety of material options, enclosure types and area classifications available



  • Advanced sensor and tube technology enable accuracy at extreme low flows
  • Process chemistry and/or process conditions can be altered without the need to change or recalibrate the measurement system
  • Multivariable outputs improve and simplify process monitoring and diagnostics, increasing yields and reducing cost of ownership
  • Integrated sensor, valve and PID control in one package simplifies purchase, installation and startup
  • Reaches set point in <2 seconds reducing wasted material
  • Compact size enables easy integration into intricate process systems
  • The Quantim® Coriolis series' has no internal moving parts, which minimizes maintenance



  • Vacuum processes
  • Catalyst research
  • Liquid precursor delivery to vaporizers
  • Precision coating
  • High accuracy filling stations
  • Metering pump feedback/control loop


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